I would disagree that most silicon AFM probes are made using SOI.
Several major probe manufacturers use a technique developed by IBM to
build monolithic Si Probes. The process is detailed in the following
paper: Wolter, Bayer, and Greshner "Micromachined silicon sensors for
scanning force microscopy" JVST B 9 (2) Mar/Apr 1991 p.1353-1357.  See
also US Patent No. 5,051,379.

Roger Shile

-----Original Message-----
 Hi Dear all,

I am trying to make cantilevers that can be used in AFM(Atomic Force
Microscope), and silicon cantilever is one of my object.  Using SOI
wafer is the mostly common and simple way to achieve that, however,
the expense is high.  Does someone know any other method to fabricate
silicon cantilevers?  Any related papers?  It will be very kind of you
to help me.

Best regards.

Duan