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MEMSnet Home: MEMS-Talk: SiO2 deposition
SiO2 deposition
1998-01-19
Robert Dean
SiO2 deposition
Robert Dean
1998-01-19
I need a system to deposit silicon dioxide onto silicon wafers.  Any
suggestions on how to do it or a piece of equipment to do it?

Robert Dean
RF CMOS Designer
MEMS Optical
205 Import Circle
Suite 2
Huntsville, AL 35806
Tel. 205-859-1886
FAX 205-859-5890
email [email protected]


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