Hi,
I want to make array of brass cantilevers on <100> si substrate. First
i will deposit brass on top of substrate using PVD.Later I will
transfer the image on the PR( here i dont know which chemical use for
etching brass - suggest me what chemical i should use to etch brass).
once this process is done I want to use 30% KOH to under etch the Si
to finally get the cantilevers.
I want to know what chemical to use to etch brass and also is there
any other way to fabricate metal cantilevers.
Thanks
Ramesh Narayanan
Syracuse University