Hello All:

I currently have a deep rie system that I run a SF6+O2 process with. We
suffer from too much undercut and I am interested in trying a new chemistry.
Does
anyone have experience with CHF3 + Hydrogen processing or any other
chemistry including Chlorine if that is needed. Our system is equipped with an
ICP
source, rie at 13.57 Mhz, Electrostatic chuck, Turbo pump. Please contact me
directly via email or call me at 602-206-6154. Thanks Bob  Henderson