Dear all

 I am santosh prasad student of M Tech here in MANIT Bhopal right now i am
designing a mems comb resonator . i am exciting the resonator in Y direction
using a straight comb and AC voltage with the frequency equal to Natural
frequency of structure in Y direction. y doing this i am getting the deflection
Z direction also. i know some displacement will come dur to cross coupling but
amout of displacement is subsatential. I just want the possible reson behind it.

thanks

Santosh