MEMS-talk

News	MEMSnet Home: MEMS-Talk: Bosch process Bosch process 2005-03-09 Pavel Neuzil 2005-03-10 Kasman , Elina 2005-03-10 Michael D Martin PECVD PolySi Deposition 2005-03-11 Eric Dy High fequency amplification 2005-03-11 Vikas Nair 2005-03-11 Isaac Wing Tak Chan Microscopy for Semiconductor Application 2005-03-13 li cai 2005-03-12 li cai etch sub-micron holes in PMMA patterned Aluminum 2005-03-12 Xin Heng Bosch process Pavel Neuzil 2005-03-09 Does anybody knows details of SF6/C4F8 process with those gases flowing simultaneously? I assume there should be some oxygene as well. Thank you and best regards reply
Events
Glossary
Materials
Links
MEMS-talk