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MEMSnet Home: MEMS-Talk: Si/Au Ohmic Contact
Si/Au Ohmic Contact
2005-03-11
Eric J. Correa
2005-03-12
li cai
2005-03-12
[email protected]
Si/Au Ohmic Contact
[email protected]
2005-03-12
You may also try Cr/Ti for the adhesion.

> Add Ni between Au and Si may help adhesion.
>
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