I require ITO films for use as conducting transparent electrodes for
Microsystem devices. My initial results with DC magnetron sputtering
show films that are reasonably conducting but the colour of the films
follows the shape of the magnetron magnet arrangement or more closely
the race track the is eroded on the sputtered target. It is dark inside
and outside this circular track. Across the track which is about 1 cm
wide the film is transparent. Has anyone observed this or got some
advice.

Thank you

Anthony Holland