PDMS thickness variation with spin speed and time.
Kapil Sahasrabudhe
2005-03-15
Hi,
I want to spin coat a 500 micron PDMS (Sylgard 184) layer on a Si wafer. I
have been trying to find any published literature presenting variation in
PDMS layer thickness with spin speed and spin time, but haven't find any. I
would appreciate your suggestions.
Thanks
Kapil