Hello,

Could anyone help me to solve the problem of etchnig Cr/Cu?
The Cu is on top of the Cr layer. The substrate is glass. The thickness
is 30nm/200nm (Cr/Cu). When I use Cr etchant (Cr-7) etch Cr layer,
the Cu will also be etched. But, is there any possible etchant could
etch Cr and but not Cu?

Best Regards

Pete,
NTU Taiwan