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MEMSnet Home: MEMS-Talk: how to prevent the natural oxide formation on poly-Si film for transportation?
how to prevent the natural oxide formation on poly-Si film for transportation?
2005-03-20
X.Guo
how to prevent the natural oxide formation on poly-Sifilm for tr
2005-03-21
li cai
how to prevent the natural oxide formation onpoly-Sifilmfor tr
2005-03-21
Jesse D Fowler
how to prevent the natural oxide formation on poly-Si film for transportation?
X.Guo
2005-03-20
Dear all,

I have a sample with ultra-thin poly-Si film on the top to be transported. Does
anybody know any ways to prevent the formation of the natural oxide layer on the
poly-Si film during transportation?

Thanks.

Xiaojun Guo
reply
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