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MEMSnet Home: MEMS-Talk: how to prevent the natural oxide formation onpoly-Sifilmfor tr
how to prevent the natural oxide formation on poly-Si film for transportation?
2005-03-20
X.Guo
how to prevent the natural oxide formation on poly-Sifilm for tr
2005-03-21
li cai
how to prevent the natural oxide formation onpoly-Sifilmfor tr
2005-03-21
Jesse D Fowler
how to prevent the natural oxide formation onpoly-Sifilmfor tr
Jesse D Fowler
2005-03-21
Assuming that "ultra-thin" means you can't expose it to liquids, you can pack it
in a dry box environment (a nitrogen filled glove box) in some sort of sealed
container. Personally, I would use a mason jar, but there's probably something
much better
("more expensive") to use for that sort of transport.

Jesse Fowler




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RE: [mems-talk] how to prevent the natural oxide formation onpoly-Sifilm for tr
                                  General MEMS discussion 









How thin is the film?  Dip in DILUTED HF may help.

>I have a sample with ultra-thin poly-Si film on the top to be transported.
>Does anybody know any ways to prevent the formation of the natural oxide
>layer on the poly-Si film during transportation?
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