how to prevent the natural oxide formation
onpoly-Sifilmfor tr
Jesse D Fowler
2005-03-21
Assuming that "ultra-thin" means you can't expose it to liquids, you can pack it
in a dry box environment (a nitrogen filled glove box) in some sort of sealed
container. Personally, I would use a mason jar, but there's probably something
much better
("more expensive") to use for that sort of transport.
Jesse Fowler
"li cai"
Sent by: [email protected]
To
[email protected]
03/20/2005 05:41 PM
cc
Subject
Please respond to
RE: [mems-talk] how to prevent the natural oxide formation onpoly-Sifilm for tr
General MEMS discussion
How thin is the film? Dip in DILUTED HF may help.
>I have a sample with ultra-thin poly-Si film on the top to be transported.
>Does anybody know any ways to prevent the formation of the natural oxide
>layer on the poly-Si film during transportation?
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