A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: how to prevent the natural oxide formation onpoly-Sifilm for tr
how to prevent the natural oxide formation onpoly-Sifilm for tr
2005-03-21
Pierre Huet
2005-03-21
[email protected]
how to prevent the natural oxide formation onpoly-Sifilm for tr
[email protected]
2005-03-21
I agree with Pierre. It is very difficult to prevent oxidation in  transport.
In addition, outgassing from various plastics used for shipping can  also
deposit unwanted materials on the surface. Depending on the next process  step
it
might be helpful to do an argon sputter prior to a metal deposition or  even
a single wafer ash using forming gas prior to the next process step. Bob
Henderson

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
University Wafer
The Branford Group
Tanner EDA by Mentor Graphics
Nano-Master, Inc.