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MEMSnet Home: MEMS-Talk: Problems with Lift-off
Problems with Lift-off
2005-03-21
Rameez Chatni
2005-03-22
Jesse D Fowler
2005-03-21
Washington, Erika B
2005-03-21
ahajjiah
Problems with Lift-off
Washington, Erika B
2005-03-21
For lift-off, we use Microchem's MP 1165 (SU-8 developer).  It is a
cheaper version of Nano remover PG.  Do not dilute the solution and heat
it to at least 70 deg C.  Lift off may take as long as 20 minutes
depending on the thickness, but it works like a champ and doesn't attack
Al.

-E. Washington

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