Hi,
You can try Shin-Etsu  SIPR9740M-13. It is a positive PR, high contrast,
instead of medium contrast of AZP4620. you can easily do features of 5:1
aspect ratio with features of 10um in 40um thickPR(single coat).
As a developer you can use TMAH.

Giancarlo

> Does anyone have an alternative to this combination with similar
> performance? The staff here is complaining about the metal in the
> developer.