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MEMSnet Home: MEMS-Talk: Cleaning Si3N4 / SiO2 Surface
Cleaning Si3N4 / SiO2 Surface
2005-03-28
[email protected]
2005-03-30
li cai
2005-03-29
[email protected]
2005-03-29
[email protected]
2005-03-29
Garber, Charles A.
2005-03-29
David Henriks
Cleaning Si3N4 / SiO2 Surface
[email protected]
2005-03-29
August,

Any resist stripper or O2 plasma should do the job.  If O2 plasma takes too
long I wonder what is the organic you are trying to remove.  I also wonder
why you fear that you will oxidize an oxide

Brent

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