Hello,

does anyone have any experience depositing thin iridium structures (50 - 100nm
thick), or know of wafer fabs that can do iridium? We have tried both ebeam
evaporation and sputtering but in both cases have to get robust structures
(passing scratch and peel tests). Ideally are looking for a third party to do
this as our cleanroom facilities are limited. Any help would be greatly
appreciated.

Regards,
Dr. Wouter Meuleman