MEMS-talk

News	MEMSnet Home: MEMS-Talk: Plasma etching with sloped sidewalls. Plasma etching with sloped sidewalls. 2005-03-30 Bruce Altemus 2005-03-30 Isaac Wing Tak Chan 2005-03-30 Shane Arthur McColman 2005-03-30 Bruce Altemus 2005-03-30 Isaac Wing Tak Chan 2005-03-31 Robert Dean 2005-03-31 Wilson, Thomas 2005-04-06 [email protected] Plasma etching with sloped sidewalls. Shane Arthur McColman 2005-03-30 See "Guidelines for etching Silicon MEMS Structures Using Flourine High Density Plasmas at Cryogenic Temperatures", J MEMS, VOL 11, No4, August 2002 -- Shane McColman reply
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