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News	MEMSnet Home: MEMS-Talk: How to do the lift off process afteraluminumdeposition? Itis negative resist. How to do the lift off process after aluminum deposition? It is negative resist. 2005-03-31 Duan How to do the lift off process after aluminumdeposition? Itis negative resist. 2005-03-31 Jesse D Fowler microstructured Pt thermal sensor 2005-04-01 Erik Jung How to do the lift off process after aluminumdeposition? It is negative resist. 2005-03-31 Hongjun-ECE 2005-03-31 Duan How to do the lift off process afteraluminumdeposition? Itis negative resist. 2005-03-31 Jesse D Fowler How to do the lift off process afteraluminumdeposition? It is negative resist. 2005-03-31 Hongjun-ECE How to do the lift off process afteraluminumdeposition? It is negative resist. 2005-03-31 Brent Garber How to do the lift off process after aluminumdeposition? It is negative resist. 2005-03-31 Shile How to do the lift off process afteraluminumdeposition? Itis negative resist. Jesse D Fowler 2005-03-31 So you are trying to do liftoff of a 1 micron metal layer with 1 micron thick PR? You need thicker PR. How much thicker, I'm not sure. I always used PR 6 times thicker than my metal layer, but that was just the convenient size. Jesse Fowler reply
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