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MEMSnet Home: MEMS-Talk: design rules 0.5 microns
anodic bonding
2005-04-08
Kamat Mahesh Keshav
design rules 0.5 microns
2005-04-08
[email protected]
design rules 0.5 microns
[email protected]
2005-04-08
Hi all

I need some help / referral:

I am looking for a mem's foundry that can manufacture / handle design rules
for a mirror size:

     Width - 0.5 microns
     Length - 0.8 to 3 microns

So far, all I have been able to fine are foundries that can support smallest
1.0 microns, dimension.

Cheers
Mr. Arie Ross



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