Natacha,

I have obtained very good adhesion using Cr/Au on Si. Could you try that
possibly? Same thickness' that you have used as well.

Thomas

-----Original Message-----
From: natacha smetana
Subject: [mems-talk] Adherence of Ti/Au films

Dear members of the MEMS community

I have a problem of adherence of my Ti/Au films on Si and glass
substrates.
Both layer are grown by thermal evaporation (Joule effect) in a vaccum
better than 1e-6 mbar. The growth speed is around 0.2 A/s for Ti and 1
A/s for Au. The thickness of my gold layer is 50 nm and between 5 and 10
nm for Ti.
Does anyone can indicate me what can be wrong with my parameters?? Or if
anyone has some parameters to recommend...