[email protected] wrote:
>
> Dear MEMS experts,
>
> I have no experience in KOH and TMAH etching of Si.  Could someone
> tell me if hard baked photoresist and cured polyimide withstand
> these Si etchants?
>
> Any suggestion is greatly appreciated. Thanks.
>
> Marvin
>
>


No!  You better use a teflon covering if you want to protect the front
side.

EH