Jiang Ziling-
Edge bead removal at Carnegie Mellon was simple, but worked well.
After spinning the wafer, we soak a cotton swab with acetone and remove
the wafer. Holding the wafer by its edge with one hand, we rub the swab
around the rim to remove the edge bead. Re-soak the swab with acetone
as needed.
The swabs we used were cotton on thin wooden sticks -- similar to
http://www.vendmarktech.com/storemaker/images/Cotton_Swabs.jpg . The
technique is forgiving because if you touch the photoresist accidently,
you'll probably touch the edge where there are no features. Take care
not to drip acetone from the swab onto the photoresist.
best,
Michael Vladimer