Hallo Sergio,

cured Polyimide (I use PI 2611) is attacked by KOH and TMAH. This does not
attack your metal but there may be problems if you use a Si-substrate.
You can also try some developers like AZ 312 MIF. It contains TMAH in a low
concentration and it also attacks PI.

If you have any other information about etching or removing of PI, I would
be very interested in.

Ralf

******************************************************
Dipl.-Ing. Ralf Keller

Fraunhofer-Institut fuer Biomedizinische Technik IBMT
Abteilung Sensorsysteme / Mikrosysteme
Ensheimer Str. 48
66386 St. Ingbert
Germany
Tel.: +49 (0) 6894 / 980-158
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e-mail: [email protected]
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