hi

 usually 1A/sec is suitable if you want really good quality film.
 If for contacting pads, you can increase to 0.5nm/sec.

best regards

jiang ziling

On 4/14/05, Andrew Xiang  wrote:
> What is a good evap or ebeam rate for depositing 1500A Al?
> Is it better to go slow or fast?1-10A/s or 50-100A/s?