hi,

  did you do dehydration at 200c for 5min before putting it in chamber?
  Ti should adhere very well generally.

  cheers
  jiang Ziling

On 4/11/05, natacha smetana  wrote:
> I have a problem of adherence of my Ti/Au films on Si and glass substrates.
> Both layer are grown by thermal evaporation (Joule effect) in a vaccum better
> than 1e-6 mbar. The growth speed is around 0.2 A/s for Ti and 1 A/s for Au.
> The thickness of my gold layer is 50 nm and between 5 and 10 nm for Ti.