Are you able to control the stress gradient with this process?  i.e. can
you make cantilevers with this stuff that don't curl when released?

-----Original Message-----
From:  Eric Miller
Subject: RE: [mems-talk] how to deposite low stress Si3N4

Here is a link to the process we use:

http://microfab.watechcenter.org/media/TechReport/Silicon%20Nitride.pdf