Dear Marvin,

they do not.

Yours Peter

>Dear MEMS experts,
>
>I have no experience in KOH and TMAH etching of Si.  Could someone
>tell me if hard baked photoresist and cured polyimide withstand
>these Si etchants?
>
>Any suggestion is greatly appreciated. Thanks.
>
>Marvin
>
>

Peter Hesketh
Associate Professor, Director MicroFluidics Center and
Co-director Microfabrication Applications Laboratory
EECS Department (M/C 154)
University of Illinois at Chicago
851 S. Morgan St., Chicago IL 60607
Phone: (312)413-7574  Fax: (312)413-0447

http://www.mal.eecs.uic.edu

Office:  Room 3015 ERF. Lab: Room 3016 ERF.