Hi Bill,
Thank you for your reply.
I am using UV -cure PU which gives me a thin flexible film molded with
patterns using PDMS.
I would be grateful if you could please give me other details like power,
etc for O2 plasma for PU -glass bonding. Will the treatment distort the
patterns which have 20 um channels?
If you have any references that would help me a lot.

Thanks
Sujatha
----- Original Message -----
From: "Bill Moffat" 
To: "Sujatha Ramachandran" ; "General MEMS
Subject: RE: [mems-talk] Cured polyurethane glass-bonding

I need more information.  If you are trying to bond a flexible polyurethane
film to glass, plasma bonding is easy.  I have used plasma times as low as
10 seconds and got terrific unpeelable bonds.  the secret is the uniformity
of the plasma, and both surfaces need plasma treatment together.  The
polyurethane needs the short time, with longer times it gets too hot. The
glass can withstand much longer time and if I was trying to bond glass to
glass I would use times like 5 minutes.  Bill Moffat