I came across this problem ~ 25 years ago, so I am not sure I remember
correctly. I think we used concentrated boiling nitric acid (nasty stuff
- be VERY careful) to oxidize through this glaze, and then removed the
layer with HF at room temperature.

Regards,
Pierre x286
-----Original Message-----
From: Michael Cooke
Subject: [mems-talk] Boron removal

I am trying ot remove spin on boron glaze after diffusion + drive in in
oxygen. HF seems to be giving me problems in getting a good clean
surface. Any solutions out there ?