yes... Brewer protex works great and we have used it.. to protect against KOH ..
it gets removed with acetone.. however if you have small dies and not the wafer
it did not work.. we used room temp PECVD process to grow hydrogenated DLC as
etch stop in that....
 case

hope that helps..

N

Joe Lonjin  wrote:
Brewer Science has a new material called protek which is specifically
for KOH/TMAH etching. Go to their web site, all the info is there.