Hi,
I have fabricated array of mico cantilevers using aluminum. dimension are
length=300um, width=200um, height=2um.(air gap3-4um) i am using sacrificial
material and washing it away to free the cantilever. But most of the
cantilevers have collapsed. I have also calculated the bending due to its
own weight and i am getting answer in nanometers. Is this happening because
of the E(Al)=70GPa or dimension is too large and collapsing due to its
ownweight? Or am i making calculation mistake?
I would really appreciate if you guys could answer my question.
Thanks
Ramesh
syracuse university.