Michael,
        The plasma density/uniformity.  The system I use is a capacitive
system which means the plasma is uniform when parallel to the flat
electrode it sees last.  I can load samples on a shelf and because the
shelf is parallel to the lower electrode and the samples are the same
height he top surface of the sampes sees the same intensity plasma every
where.  Let me know what plasma system you are using and what the shape
of the samples are. It is possible I can run some samples for you.  Bill

-----Original Message-----
From: Vladimer Michael
Subject: Re: [mems-talk] Cured polyurethane glass-bonding

Bill-

  What is meant by "the secret is the uniformity of the plasma"?
  Is this in time? -how the plasma density changes over the duration of
the plasma treatment.
  Or in space? -how the plasma varies throughout the chamber,
consequently exposing different portions of the material to different
plasma densities.
  Currently, I have variations in both during my plasma treatment and
I'm getting rather irregular results.  Any help would be apprecaited.