Hello Neal,
Thanks for your reply, I appreciate it. I understand that PDMS can be spin
coated on to substrates. However, I was wondering how we could make Cantilever
structures. Peeling of a small thickness of PDMS about 1000 nm would peel off
the whole PDMS layer. Can SU-8 be used to transfer PDMS layer onto a substrate?
Would there be some adhesion problems with PDMS transfer? Also, since the
thickness is 1000 nm, wouldn't the PDMS cantilever jus curl up? I would
appreciate your reply for the above questions. Thank You.

Vinny

[email protected] wrote:
Hello Vinny,

I am not sure if this can help you but here is some information.

You may be able to spin on a glass film of any thickness from zero to 5000
angstroms and possibly thicker.

These films can be similar to a thermal oxide but not as dense and they are
available with different methyl, phenyl or other organic groups in the
polymeric structure. These glasses may be spun on and baked usually 80,
150, and 250 deg c for ! minute then further densified at 400c in Nitrogen.
The solvent in these solutions is usually an alcohol ketone mixture.

Perhaps this can help as it is an organosilane structure like you are
interested in.

If you have further interest and wish to know where to obtain these
materials please mail me and I can provide some names.