dear all,

i plant to deposite SiO2 by LPCVD employing SiH4 and O2 as precursors,but i
wonder whether the mixture of SiH4 and O2 will explode at high temperature?
SiH4+2O2---SiO2+2H2O   (1)
SiH4+O2---SiO2+2H2     (2)

Thanks

anodle