Hi,

I am developing SU-8 2050 after spun around 50um.
My procedures for soft baking, exposure, and PEB are correct.
I am having trouble getting clean develops after about 6min and 2-3s acetone
spray.
What I am getting are some milky residue around my features. I understand I need
to develop it more when this occurs, but this milky residue still remains or the
SU-8 would come off.

Anyone have any suggestions? Maybe I need to expose more?

Thank you very much,

Nan Xie