Hi Mojgan
Cr will oxidize and nitridise in an un-controlled fashion - you want be able
to get consistent results
Shay
-----Original Message-----
From: Mojgan Daneshmand
Subject: [mems-talk] Cr as resistor
I need to deposit a resistive layer for an RF circuit. My main circuit is
from gold and we use Cr as adhesive layer. I was wondering if I can use this
Cr layer as resistive layer for biasing the RF circuit?? I looked on the
web, it seems no one is using Cr as resistors and everyone is using it in
the form of a mixture.