Try TiN, it is normally reactively sputtered and to be effective the
stochiometry must be "right on". Gary

-----Original Message-----
From: Steven McMaster [SMTP:[email protected]]
Subject: [mems-talk] Diffusion barrier for Ga into Au

Does anyone know a successful barrier to prevent Ga diffusion into Au during
400C annealing? Currently I am trying Ti and Pt, but to no avail.