Gary,
Thanks for your mail. Do you have any more information on TiN, i.e. sheet
resistance, which thickness, grade of N, correct stochiometry etc?

Regards,
Steven.

-----Original Message-----
From: Gary
Subject: RE: [mems-talk] Diffusion barrier for Ga into Au

Try TiN, it is normally reactively sputtered and to be effective the
stochiometry must be "right on". Gary