Steven, I dont recall the sheet resistivity but it is very specific for the
proper stochiometry.  An easy way to tell if you have the right
stochiometry is by the color,  the film should be the precise color of
gold.  If there is any green tinge then it is not correct.  The stuff is
about as non reactive a material as can be found, it will never tarnish,
like gold, but since it is so stable it makes a good barrier, unlike gold
which will alloy, this material is a cermet and will not alloy.  It does
however conduct.  Hope this helps, Gary

-----Original Message-----
From: Steven McMaster [SMTP:[email protected]]
Subject: RE: [mems-talk] Diffusion barrier for Ga into Au

Gary,
Thanks for your mail. Do you have any more information on TiN, i.e. sheet
resistance, which thickness, grade of N, correct stochiometry etc?