There's also a good treatment in The MEMS Handbook, Ed. Mohamed Gad-el-Hak
0-8493-0077-0

Andrew Fung

-----Original Message-----
From: Vladimer Michael
Subject: RE: [mems-talk] details on microfluidics

"Fundamentals and applications of microfluidics"
by Nam-Trung Nguyen and Steven T. Wereley
ISBN 1-58053-343-4

This book has explanations of microfluidic principles, mems fabrication,
and example problems.  I think it's what you're looking for.