The way you apply the SU8 affects the air bubbles, if  you use a pipette
with thin SU8 (like 2005) then things will probably be ok, but with
thick SU8 (like 2050) I find it better to just pour it out from the
bottle to minimize the bubbles.

Joe Grogan

Jiang Ziling wrote:

>  I am using Su-8 and frequently there are air bubbles left in the
>film after spin coating. It is more serious with thicker films. I
>tried to get rid of them by putting the pre-spinning resist-coated
>wafer in vacuum dessicator, but the bubbles won't go. Anyone have
>experience in this?