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MEMSnet Home: MEMS-Talk: Adhesion problem of SU-8 on metal surface
Adhesion problem of SU-8 on metal surface
2005-05-01
Zhiyan Liu
2005-05-02
Michael L
2005-05-03
Maria Nordstrom
2005-05-03
Brubaker Chad
2005-05-10
Rob Hardman
Adhesion problem of SU-8 on metal surface
Maria Nordstrom
2005-05-03
Dear Zhiyan,

We have done a detailed study of the adhesion between SU-8 and metal and
I send you a copy of the article. Unfortunately, we did not investigate
how to improve the adhesion between SU-8 and Cu, but I can refer you to
work done by J. Ge and J.K. Kivilahti published in Journal of Applied
Physics 92(6) (2002) 3007-3015.

I hope you will find our study useful!

Sincerely,
Maria Nordstr
PhD Student, Bioprobe Group
MIC - Department of Micro and Nanotechnology
Technical University of Denmark
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