Have you tried looking into an Axic Plasmastar. It has gives a great uniform
layer.

-----Original Message-----
From: Patrick Roman 
Subject: [mems-talk] Plasma etching MWCNTs

Greetings MEMS-Talk colleagues-

I am looking for information regarding plasma etching of multi wall carbon
nanotubes (MWCNTs)  I have an amorphous carpet structure and I wish to trim
the top tubes off to achieve a more uniform layer.

Patrick Roman, M.S.