Hi,

   This is ravikumar. I am working on structural design and evaluation of
different MEMS gyroscopes. I am new to this area. For one of the
models, I have taken some rough dimensions of flexures and proof mass
and seeing the modes. This, i am doing iteratively by changing the
dimensions in ANSYS. It is very much time consuming and complex to get
the matched frequencies. Also if i get the frequency match, the drive
amplitude is very less of the order of .05 microns. I dont have access
to Coventorware.  Please Suggest me any idea how to proceed towards the
structural design.

   Also the specifications of gyroscope are little confusing. I didnt find
clear explanation of how to extract the specifications in any paper.
Please help me in this regard. Thanks in advance.

Ravikumar
[email protected]