Rihui,

I use AZ 4620 this type of resist is easy to reflow @ about 120c. Regarding the
round edge I'm not sure what your trying to do with this.

Best Regards
Tony

-----Original Message-----
From: Rihui He 
Subject: [mems-talk] photoresist or polyimide sacrificial layer

I am planning to use AZ 4620 or AZ 4330 as sacrificial layer for my metal
device. Are they easy to reflow to form a round edge? Or I may get better
result by using polyimide?