Carol,

I don't think resist will work in KOH. I tried using photo resist  in KOH it
just dissolves. I use Nitride as a mask for KOH.

-----Original Message-----
From: Lu Carol 
Subject: [mems-talk] photoresist mask for KOH etching

Hi, does anyone know whether photoresist can be used as mask for KOH etching? If
it does, what is it? Does SU-8 work? Thanks.