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MEMSnet Home: MEMS-Talk: AZ photoresists
AZ photoresists
2005-05-10
Ramon F. Figueroa
2005-05-11
Brubaker Chad
material that expands?
2005-05-11
[email protected]
2005-05-11
Isaac Wing Tak Chan
AZ photoresists
Ramon F. Figueroa
2005-05-10
Hi all,

I am having trouble with thickness, under/over exposure, and under/over
development of AZ4110 and AZ4330 photoresists.  Does anyone has some data on:
PR thickness vs rpm's
exposure dose vs PR thickness
development time vs PR thickness
or other info that could help me?

Ramon Figueroa
Graduate Research Assistant
Microelectronics-Photonics Graduate Program
University of Arkansas

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