Ramon,

Your best bet would be to contact AZ directly.

Their websit can be found at www.az-em.com

Best Regards,
Chad Brubaker

 -----Original Message-----
From: Ramon F. Figueroa
Subject: [mems-talk] AZ photoresists

Hi all,

I am having trouble with thickness, under/over exposure, and under/over
development of AZ4110 and AZ4330 photoresists.  Does anyone has some
data on PR thickness vs rpm's exposure dose vs PR thickness development
time vs PR thickness or other info that could help me?