I have been to make a PMMA microchannel with LIGA technique.
I think you can get a satisfactory results if you use it.

Thanks

-----Original Message-----
From: Mielnik, Michal
Subject: [mems-talk] non-mechanical polishing of PMMA

I am working with micromachined (milled) PMMA microchannels. The
dimensions are typically down to 50 microns.
However, the roughness of the surfaces after machining is somewhat high.
Does anyone have an idea on how I can polish these channels? (make
smooth walls). I cannot do it mechanically due to the dimensions. So;
Is it possible to simply flush them with e.g. some solvent like toulene
or dichloromethane to obtain smoother surfaces?
Any idea on flow rates and treatment times?